Ultra high purity transducer

Part number: Models WUD-20-E, WUD-25-E, WUD-26-E

Applications

  • Semiconductor, display and photovoltaic industry
  • Ultrapure gas supply in semiconductor production systems

Special Features

  • Highest process safety through file over EtherCAT®
  • Expanded spectrum of features
  • Scalable quantities and individual adaptations for OEM applications
  • Maximum plant safety through cable redundancy

Description

The WUD-2x-E model is a particularly compact, ultra high purity transducer for high-accuracy pressure measurement of ultrapure gases in the semiconductor industry. It is the first transducer to use the SDP 5003.2080 and offers maximum security of investment. Due to minimal signal noise, the sensor provides precise measured values in the long term. Thanks to active temperature compensation, even with high temperature fluctuations. Measured values can be viewed on the display.

Highest process safety through file over EtherCAT®
Thanks to EtherCAT®, the model WUD-2x-E does not have to be disconnected from the network for firmware updates or troubleshooting. This avoids production downtime due to incorrect installation or removal, maximises process safety and allows updating of the instruments.

Expanded spectrum of features
New functions thanks to the digital interface: In addition to pressure values, temperature data or error status can also be transmitted.

Instruments can thus be monitored extensively and problems detected at an early stage.Parameters can be configured digitally and transferred from a defective instrument to a new one. The sensor can even be replaced while the EtherCAT® system is running, using the hot-swap feature. This means less downtime and lower costs.

Scalable quantities and individual adaptations for OEM applications
Production takes place with a high degree of automation in a clean room. The high production capacity offers security of supply. Via model coding, solutions with individually configured connections are enabled.

Maximum plant safety through cable redundancy
The model WUD-2x-E features two RJ-45 connections. The cable redundancy enables trouble-free communication, even if one sensor in the system fails. The benefit: Greater process safety with reduced risk of downtime.